Coherent Verdi Visible 5W 532nm Laser

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Important Features:

•    Optical noise <0.02% RMS measured from 10 Hz to 1 GHz
•    Output power from 0.1 to 5 W
•    Produces coherent green light at 532nm

Applications:

•    Holography
•    Interferometry
•    Light manipulation

 

Optical Profilometer (Zygo NewView 6000)

Important Features: 

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  • Uses scanning white light interferometry to image and measure the micro structure and topography of surfaces in three dimensions
  • Vertical z-scan measurement range from 0.1 nm to 15000 µm
  • Optical microscope lateral resolution > 0.45 µm to 11.8 µm
  • Data scan rate of up to 85 µm/sec with 0.1 nm height resolution
  • Step height accuracies of better than 0.75%
  • Scan and display areas up to 150 mm x 150 mm

Applications:

•    For non-contact surface structure and thin film thickness measurements
•    Images and measurements of surface morphology 


Laurell Spincoater (WS-650MZ-23NPP/LITE)

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Important features:
•    Fully programmable with multi-step process capability
•    Accommodates up to 150mm wafers and 5” by 5” substrates
•    Rotation speeds up to 12,000rpm
•    Includes 4 programmable syringes for dispensing fluids 

Applications:
•    Deposition of thin films
•    Coating

NuArc 26-1K Mercury Exposure System

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Important features:
•    300 W broadband UV power output
•    Vacuum frame

Applications:
Applications:
•    Lithography
•    UV curing